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Nanopowder management and control of plasma parameters in electronegative SiH[sub 4] plasmas.

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Title: Nanopowder management and control of plasma parameters in electronegative SiH[sub 4] plasmas.
Authors: Denysenko, I. B.1, syxu@nie.edu.sg, Ostrikov, K.2, Xu, S.1, Yu, M.Y.3, Diong, C. H.4
Source: Journal of Applied Physics; 11/1/2003, Vol. 94 Issue 9, p6097, 11p, 1 Chart, 7 Graphs
Database: Applied Science & Technology Source
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DbLabel: Applied Science & Technology Source
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AccessLevel: 2
PubType: Academic Journal
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; 11/1/2003, Vol. 94 Issue 9, p6097, 11p, 1 Chart, 7 Graphs
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=11188555
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        Value: 10.1063/1.1618356
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      – Code: eng
        Text: English
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            NameFull: Xu, S.
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              Text: 11/1/2003
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              Y: 2003
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