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Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers.

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Title: Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers.
Authors: Butt, Jordan N.1,2, Tyndall, Nathan F.1, Pruessner, Marcel W.1, Walsh, Kyle J.1, Miller, Benjamin L.3,4, Fahrenkopf, Nicholas M.5,6, Antohe, Alin O.5,6, Stievater, Todd H.1, todd.h.stievater.civ@us.navy.mil
Source: APL Photonics; Jan2024, Vol. 9 Issue 1, p1-8, 8p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 175214463
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers.
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1063/5.0173914
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      – Code: eng
        Text: English
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        PageCount: 8
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      – TitleFull: Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers.
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            NameFull: Pruessner, Marcel W.
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            NameFull: Walsh, Kyle J.
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            NameFull: Miller, Benjamin L.
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            NameFull: Antohe, Alin O.
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              Text: Jan2024
              Type: published
              Y: 2024
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            – TitleFull: APL Photonics
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