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Optimizing misfit dislocation glide kinetics for enhanced threading dislocation density reduction in Si1−xGex/Si(001) layers through dynamic growth rate control.

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Title: Optimizing misfit dislocation glide kinetics for enhanced threading dislocation density reduction in Si1−xGex/Si(001) layers through dynamic growth rate control.
Authors: Becker, L.1,2, lucas.becker@siltronic.com, Storck, P.1, Liu, Y.3, Schwalb, G.1, Schroeder, T.4,5, Fischer, I. A.2, Albrecht, M.4
Source: Journal of Applied Physics; 5/28/2024, Vol. 135 Issue 20, p1-9, 9p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 177610041
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Optimizing misfit dislocation glide kinetics for enhanced threading dislocation density reduction in Si1−xGex/Si(001) layers through dynamic growth rate control.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Becker%2C+L%2E%22">Becker, L.</searchLink><relatesTo>1,2</relatesTo>, <i>lucas.becker@siltronic.com</i><br /><searchLink fieldCode="AU" term="%22Storck%2C+P%2E%22">Storck, P.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Liu%2C+Y%2E%22">Liu, Y.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Schwalb%2C+G%2E%22">Schwalb, G.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Schroeder%2C+T%2E%22">Schroeder, T.</searchLink><relatesTo>4,5</relatesTo><br /><searchLink fieldCode="AU" term="%22Fischer%2C+I%2E+A%2E%22">Fischer, I. A.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Albrecht%2C+M%2E%22">Albrecht, M.</searchLink><relatesTo>4</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; 5/28/2024, Vol. 135 Issue 20, p1-9, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=177610041
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/5.0204318
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 1
    Titles:
      – TitleFull: Optimizing misfit dislocation glide kinetics for enhanced threading dislocation density reduction in Si1−xGex/Si(001) layers through dynamic growth rate control.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Becker, L.
      – PersonEntity:
          Name:
            NameFull: Storck, P.
      – PersonEntity:
          Name:
            NameFull: Liu, Y.
      – PersonEntity:
          Name:
            NameFull: Schwalb, G.
      – PersonEntity:
          Name:
            NameFull: Schroeder, T.
      – PersonEntity:
          Name:
            NameFull: Fischer, I. A.
      – PersonEntity:
          Name:
            NameFull: Albrecht, M.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 28
              M: 05
              Text: 5/28/2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 135
            – Type: issue
              Value: 20
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1