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Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.

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Title: Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.
Authors: Fields, Shelby Sutton1, shelby.s.fields.civ@us.navy.mil, White, Christopher David1, Knipling, Keith E.1, Bennett, Steven P.1
Source: Review of Scientific Instruments; Feb2026, Vol. 97 Issue 2, p1-8, 8p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 191986257
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.
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  Data: <searchLink fieldCode="JN" term="%22Review+of+Scientific+Instruments%22">Review of Scientific Instruments</searchLink>; Feb2026, Vol. 97 Issue 2, p1-8, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=191986257
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1063/5.0303021
    Languages:
      – Code: eng
        Text: English
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        PageCount: 8
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      – TitleFull: Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.
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            NameFull: Fields, Shelby Sutton
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            NameFull: White, Christopher David
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            NameFull: Knipling, Keith E.
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            NameFull: Bennett, Steven P.
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              Text: Feb2026
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              Y: 2026
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              Value: 97
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