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A new fabrication technique for optoelectronic integrated circuits (OEIC's)—the graded-step process—applied to the fabrication of AlGaAs/GaAs PIN/FET and PIN/amplifier.

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Title: A new fabrication technique for optoelectronic integrated circuits (OEIC's)—the graded-step process—applied to the fabrication of AlGaAs/GaAs PIN/FET and PIN/amplifier.
Authors: Wada, O., Miura, S., Machida, H.
Source: Journal of the Electrochemical Society; August 1985, Vol. 132, p1996-2002, 7p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500814396
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: A new fabrication technique for optoelectronic integrated circuits (OEIC's)—the graded-step process—applied to the fabrication of AlGaAs/GaAs PIN/FET and PIN/amplifier.
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  Data: <searchLink fieldCode="AU" term="%22Wada%2C+O%2E%22">Wada, O.</searchLink><br /><searchLink fieldCode="AU" term="%22Miura%2C+S%2E%22">Miura, S.</searchLink><br /><searchLink fieldCode="AU" term="%22Machida%2C+H%2E%22">Machida, H.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; August 1985, Vol. 132, p1996-2002, 7p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500814396
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1149/1.2114268
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 7
        StartPage: 1996
    Titles:
      – TitleFull: A new fabrication technique for optoelectronic integrated circuits (OEIC's)—the graded-step process—applied to the fabrication of AlGaAs/GaAs PIN/FET and PIN/amplifier.
        Type: main
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      – PersonEntity:
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            NameFull: Wada, O.
      – PersonEntity:
          Name:
            NameFull: Miura, S.
      – PersonEntity:
          Name:
            NameFull: Machida, H.
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          Dates:
            – D: 01
              M: 08
              Text: August 1985
              Type: published
              Y: 1985
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              Value: 00134651
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            – Type: volume
              Value: 132
          Titles:
            – TitleFull: Journal of the Electrochemical Society
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