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Multidirectional UV Lithography for Complex 3-D MEMS Structures.

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Bibliographic Details
Title: Multidirectional UV Lithography for Complex 3-D MEMS Structures.
Authors: Yoon, Yong-Kyu, Park, Jung-Hwan, Allen, Mark G.
Source: Journal of Microelectromechanical Systems; October 2006, Vol. 15 Issue 5, p1121-1130, 10p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501326657
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Multidirectional UV Lithography for Complex 3-D MEMS Structures.
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  Data: <searchLink fieldCode="AU" term="%22Yoon%2C+Yong-Kyu%22">Yoon, Yong-Kyu</searchLink><br /><searchLink fieldCode="AU" term="%22Park%2C+Jung-Hwan%22">Park, Jung-Hwan</searchLink><br /><searchLink fieldCode="AU" term="%22Allen%2C+Mark+G%2E%22">Allen, Mark G.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Microelectromechanical+Systems%22">Journal of Microelectromechanical Systems</searchLink>; October 2006, Vol. 15 Issue 5, p1121-1130, 10p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501326657
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1109/JMEMS.2006.879669
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 10
        StartPage: 1121
    Titles:
      – TitleFull: Multidirectional UV Lithography for Complex 3-D MEMS Structures.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Yoon, Yong-Kyu
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          Name:
            NameFull: Park, Jung-Hwan
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            NameFull: Allen, Mark G.
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            – D: 01
              M: 10
              Text: October 2006
              Type: published
              Y: 2006
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              Value: 15
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              Value: 5
          Titles:
            – TitleFull: Journal of Microelectromechanical Systems
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