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Low-temperature film thickness measurements by a quartz thickness monitor.

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Bibliographic Details
Title: Low-temperature film thickness measurements by a quartz thickness monitor.
Authors: Barrett, P. H., Pasternak, M.
Source: Journal of Applied Physics; July 1977, Vol. 48, p3116-3117, 2p
Database: Applied Science & Technology Source
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DbLabel: Applied Science & Technology Source
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AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Low-temperature film thickness measurements by a quartz thickness monitor.
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  Data: <searchLink fieldCode="AU" term="%22Barrett%2C+P%2E+H%2E%22">Barrett, P. H.</searchLink><br /><searchLink fieldCode="AU" term="%22Pasternak%2C+M%2E%22">Pasternak, M.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; July 1977, Vol. 48, p3116-3117, 2p
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    Identifiers:
      – Type: doi
        Value: 10.1063/1.324083
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 2
        StartPage: 3116
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      – TitleFull: Low-temperature film thickness measurements by a quartz thickness monitor.
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            NameFull: Barrett, P. H.
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            NameFull: Pasternak, M.
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              Text: July 1977
              Type: published
              Y: 1977
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              Value: 48
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            – TitleFull: Journal of Applied Physics
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